KLA Tencor Surfscan 6220

  • Capable of 2" -8" wafers
  • Non-patterned surface Inspection System
  • 0.12 micron Defect Sensitivity @ 95% capture, based on PSL Standards
  • 0.02 ppm Haze Sensitivity
  • Refurbished to OEM specifications
  • 488 nm 30mw ArLaser, Spot Size 90µ
  • Scan Frequency 170 Hz; Scan Pitch: 10,20 and 40µ
  • Throughput 150/6" wph

 

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