KLA Tencor Surfscan 6220
- Capable of 2" -8" wafers
- Non-patterned surface Inspection System
- 0.12 micron Defect Sensitivity @ 95% capture, based on PSL Standards
- 0.02 ppm Haze Sensitivity
- Refurbished to OEM specifications
- 488 nm 30mw ArLaser, Spot Size 90µ
- Scan Frequency 170 Hz; Scan Pitch: 10,20 and 40µ
- Throughput 150/6" wph
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