Nikon stepper NSR2005 i9

Wafer size:150mm or 200mm,Flat and notch wafers

Resolution:0.5um

Depth of focus:<0.6um

Distortion:Within+/-0.65um

ORT:Within +/-0.15 sec

Uniformity:less than<1.5%

Intensity:More than 500 mw/cm2

Reticle blind:0.4mm~0.8mm(on reticle)

Wafer flatness:Within 2.5um

Stepping:3σ within 0.065um

Contact: Ms. Aileen

Sandosson@sandosson

+86 16602188297

Shanghai Naperville International Co., Ltd.

• Nikon Stepper
• Nikon i9
• NSR2005 i9
• Nikon stepper NSR2005 i9