Hitachi S9300/S7840 CD-SEM
Hitachi S-9300/S-7840 CD-SEM
The Terminal PC is networked with multiple CD-SEMs which are located within clean rooms in fabrication areas.
It allows operator(s) in offices (outside the clean rooms) to download the measurement data. It also allows off-line work such as display/review of measurement data,
off-line measurements, check of parameters in recipes for automated measurements, check and analysis of error generations due to recipes without using nor interrupting CD-SEMs.
| Module | Function | Full | Lite | |
|---|---|---|---|---|
| 1 | Transfer software |
Automatic and/or manual transfer of measurement result files and image files from a CD-SEM to the Terminal PC. |
✓ | ✓ |
| 2 | Recipe evaluation software |
Displays performance and error information for each recipe in Excel® |
✓ | N/A |
| 3 | Recipe viewer software | Displays all recipe information | ✓ | N/A |
| 4 | Data processing software |
Customerized Excel Macros for evaluation or presentation of data. |
✓ | ✓ |
| 5 | Off-line measurement software |
Re-measurement of images on the Terminal PC without interrupting CD-SEMs. |
✓ |
N/A |
.
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