KLA - 5200
產品特點
Equipment description:
‧Purpose: Overlay measurement
‧Model: KLA-Tencor 5200
‧Original Manufacture Date: October, 1997
‧SN: 2100
技術規格
System configuration:
‧Currently Configured for 200mm Wafer Size
‧Handler: 200mm Dual SMIF
‧Cassette Handling: Vacuum Handling Autoloader
‧Robot: Autoloader, Single End-Effector
‧Chuck Type: 200mm Vacuum
‧Operator Interface: Mouse and keyboard standard
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