KLA - Tencor SP1 DLS (2005 Vintage)

產品特點

Equipment description:

‧Status : Installed and demonstrable

‧Manufacturer : KLA / TENCOR

‧Model : SURFSCAN SP1 DLS

‧Vintage : 2005

‧Equipment Details : Particle measurement system

• KLA
• Tencor
• SP1
• DLS
• KL-SP1